Measurement of Ion Sputtering Yields for In-depth Profiling Analysis
نویسندگان
چکیده
منابع مشابه
Enhanced sputtering yields from single-ion impacts on gold nanorods.
Sputtering yields, enhanced by more than an order of magnitude, have been observed for 80 keV Xe ion irradiation of monocrystalline Au nanorods. Yields are in the range 100-1900 atoms/ion compared with values for a flat surface of ≈50. This enhancement results in part from the proximity of collision cascades and ensuing thermal spikes to the nanorod surfaces. Molecular dynamic modeling reveals...
متن کاملEffect of surface morphology on the sputtering yields. I. Ion sputtering from self-affine surfaces
As extensive experimental studies have shown, under certain conditions, ion bombardment of solid targets induces a random (self-affine) morphology on the ion-eroded surfaces. The rough morphology development is known to cause substantial variations in the sputtering yields. In this article, we present a theoretical model describing the sputter yields from random, self-affine surfaces subject to...
متن کاملEffect of surface morphology on the sputtering yields. II. Ion sputtering from rippled surfaces
Off-normal ion bombardment of solid targets with energetic particles often leads to development of periodically modulated structures on the surfaces of eroded materials. Ion-induced surface roughening, in its turn, causes sputtering yield changes. We report on a comprehensive theoretical study of the effect of rippled surface morphology on the sputtering yields. The yield is computed as a funct...
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ژورنال
عنوان ژورنال: Tetsu-to-Hagane
سال: 1991
ISSN: 0021-1575,1883-2954
DOI: 10.2355/tetsutohagane1955.77.12_2171